Low-coherence interferometer measuring absolute thickness and topography with high accuracy

Yang Zhao; Greg Schmidt; Jonathan D. Ellis; Duncan T. Moore

doi:10.1364/OFT.2017.OM3B.6

Low-coherence interferometer measuring absolute thickness and topography with high accuracy

Yang Zhao, Greg Schmidt, Jonathan D. Ellis, Duncan T. Moore

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An interferometer was developed to measure the absolute thickness map of plane-parallel optical samples up to 50 mm diameter, with 30 nm repeatability, and <100 nm accuracy. The surface topography of the sample was also measured and compared to be consistent with a Zygo white light interferometer.

Original language	English (US)
Title of host publication	Optical Design and Fabrication, OFT 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580316
DOIs	https://doi.org/10.1364/OFT.2017.OM3B.6
State	Published - 2017
Event	Optical Design and Fabrication, OFT 2017 - Denver, United States Duration: Jul 9 2017 → Jul 13 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F56-OFT 2017
ISSN (Electronic)	2162-2701

Other

Other	Optical Design and Fabrication, OFT 2017
Country/Territory	United States
City	Denver
Period	7/9/17 → 7/13/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/OFT.2017.OM3B.6

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Low-coherence interferometer measuring absolute thickness and topography with high accuracy. / Zhao, Yang; Schmidt, Greg; Ellis, Jonathan D. et al.
Optical Design and Fabrication, OFT 2017. Optica Publishing Group (formerly OSA), 2017. (Optics InfoBase Conference Papers; Vol. Part F56-OFT 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Y, Schmidt, G, Ellis, JD & Moore, DT 2017, Low-coherence interferometer measuring absolute thickness and topography with high accuracy. in Optical Design and Fabrication, OFT 2017. Optics InfoBase Conference Papers, vol. Part F56-OFT 2017, Optica Publishing Group (formerly OSA), Optical Design and Fabrication, OFT 2017, Denver, United States, 7/9/17. https://doi.org/10.1364/OFT.2017.OM3B.6

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title = "Low-coherence interferometer measuring absolute thickness and topography with high accuracy",

abstract = "An interferometer was developed to measure the absolute thickness map of plane-parallel optical samples up to 50 mm diameter, with 30 nm repeatability, and <100 nm accuracy. The surface topography of the sample was also measured and compared to be consistent with a Zygo white light interferometer.",

author = "Yang Zhao and Greg Schmidt and Ellis, {Jonathan D.} and Moore, {Duncan T.}",

note = "Publisher Copyright: {\textcopyright} OSA 2017.; Optical Design and Fabrication, OFT 2017 ; Conference date: 09-07-2017 Through 13-07-2017",

year = "2017",

doi = "10.1364/OFT.2017.OM3B.6",

language = "English (US)",

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AB - An interferometer was developed to measure the absolute thickness map of plane-parallel optical samples up to 50 mm diameter, with 30 nm repeatability, and <100 nm accuracy. The surface topography of the sample was also measured and compared to be consistent with a Zygo white light interferometer.

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BT - Optical Design and Fabrication, OFT 2017

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T2 - Optical Design and Fabrication, OFT 2017

Y2 - 9 July 2017 through 13 July 2017

ER -

Low-coherence interferometer measuring absolute thickness and topography with high accuracy

Abstract

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Other

ASJC Scopus subject areas

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