TY - JOUR
T1 - Lithography performance and environmental compatibility of PFOS-free photoacid generators
AU - Sun, Wenjie
AU - Cho, Youngjin
AU - Krysak, Marie
AU - Ouyang, Christine Y.
AU - Sierra-Alvarez, Reyes
AU - Ober, Christopher K.
N1 - Funding Information:
The authors gratefully acknowledge the Semiconductor Research Corporation/Sematech Engineering Research Center for Environmentally Benign Semiconductor Manufacturing located at the University of Arizona for funding this research. The authors also thank the CNF for use of the facilities. This work was performed in part at the CNF, a member of the National Nanotechnology Coordinated Infrastructure, supported by the National Science Foundation (NSF) (Grant ECCS-1542081) and the Cornell Center of Materials Research supported through the NSF Materials Research Science and Engineering Centers program DMR-1120296. The authors acknowledge Lila Otero-Gonzalez and Scott Boitano for their support with the RTCA bioassays.
Publisher Copyright:
© 2017 ICE Publishing. All rights reserved.
PY - 2017
Y1 - 2017
N2 - Photoacid generators (PAGs) with environmentally friendly cores and partially fluorinated sulfonate salts have been synthesized and studied. The cores were based on naturally occurring compounds such as cholesterol and glucose and were functionalized with a biodegradable octafluoro-3-oxapentanesulfonate. These PAGs were soluble in common spinning solvents and lithographically characterized with poly(styrene-co-4-hydroxy-styrene-co-tert-butylacetate) photoresist, and they showed higher resolution for photoresist applications than a perfluorooctane sulfonate (PFOS)based triphenylsulfonium salt PAG, capable of patterning 50 nm dense lines. In addition, microbial bioassays confirmed that the newly developed PAG compounds can be broken down by microorganisms commonly found in conventional wastewater treatment systems. The biodegradation potential of the new PAGs presents a distinct advantage compared to that of PAG perfluorinated structures such as PFOS and perfluorobutane sulfonate, which are highly resistant to biodegradation and difficult to treat by conventional processes. The excellent performance and environmental compatibility of these PAGs make them promising candidates for use in high-resolution lithography systems.
AB - Photoacid generators (PAGs) with environmentally friendly cores and partially fluorinated sulfonate salts have been synthesized and studied. The cores were based on naturally occurring compounds such as cholesterol and glucose and were functionalized with a biodegradable octafluoro-3-oxapentanesulfonate. These PAGs were soluble in common spinning solvents and lithographically characterized with poly(styrene-co-4-hydroxy-styrene-co-tert-butylacetate) photoresist, and they showed higher resolution for photoresist applications than a perfluorooctane sulfonate (PFOS)based triphenylsulfonium salt PAG, capable of patterning 50 nm dense lines. In addition, microbial bioassays confirmed that the newly developed PAG compounds can be broken down by microorganisms commonly found in conventional wastewater treatment systems. The biodegradation potential of the new PAGs presents a distinct advantage compared to that of PAG perfluorinated structures such as PFOS and perfluorobutane sulfonate, which are highly resistant to biodegradation and difficult to treat by conventional processes. The excellent performance and environmental compatibility of these PAGs make them promising candidates for use in high-resolution lithography systems.
KW - Biodegradable polymers
KW - Environmental impact
KW - Green chemistry
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U2 - 10.1680/jgrma.17.00020
DO - 10.1680/jgrma.17.00020
M3 - Article
AN - SCOPUS:85058226286
VL - 5
SP - 173
EP - 181
JO - Green Materials
JF - Green Materials
SN - 2049-1220
IS - 4
ER -