Abstract
The optical quality of solgel processed Pb(Zr,Ti)O3 thin films has been investigated using spectrally and angularly resolved light scattering. Measurements were performed on a series of films of differing thicknesses, and the results were compared to the predictions of model calculations based upon scattering due to surface roughness, or due to variations of the dielectric constant within the volume of the film. The surface scattering model successfully reproduced many of the features of the observed light scattering. In contrast, the predictions of the volume scattering model differed substantially from the experimental data. In addition, the surface roughness spectrum obtained using atomic force microscopy was used to calculate the angularly resolved light scattering expected for one of the films. For angles greater than ~20°, the predicted and experimentally determined light scattering were in close agreement. These results indicate that light scattering from these films is primarily due to surface roughness.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 25-34 |
| Number of pages | 10 |
| Journal | Integrated Ferroelectrics |
| Volume | 11 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - Nov 1995 |
| Externally published | Yes |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry