@inproceedings{3a8b2c33d2834ed6ac5861bcf5446d08,
title = "Laser modulation simulation of micro-crack morphology evolution during chemical etching",
abstract = "Subsurface micro-cracks will be generated during the grinding and polishing processes of optical components. Microcracks have a modulation effect on the laser, thereby reducing the laser damage threshold. The FDTD method is used to simulate the light intensity distribution modulated by micro-crack. By comparing the simulation results of radial crack, parabolic crack and elliptic crack, the modulation mechanism of micro-crack is revealed. The results show that for the crack with the same width and depth, light intensity enhancement factor (LIEF) modulated by radial crack on the rear surface and parabolic crack on the front surface is the largest; LIEF modulated by elliptical crack on the rear surface and radial crack on the front surface is the smallest. In addition, when the crack width-depth ratio is the same, the larger the depth, the higher the LIEF. As the width-depth ratio increases, the LIEF value increases firstly, then decreases, and finally approaches a stable value.",
keywords = "Elliptical crack, FDTD, Light intensity enhancement factor, Parabolic crack, Radical crack",
author = "Zhi Chen and Huapan Xiao and Zhibin Li and Na Yu and Hairong Wang and Rongguang Liang",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; Pacific-Rim Laser Damage 2019: Optical Materials for High-Power Lasers ; Conference date: 19-05-2019 Through 22-05-2019",
year = "2019",
doi = "10.1117/12.2540729",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jianda Shao and Takahisa Jitsuno and Wolfgang Rudolph",
booktitle = "Pacific-Rim Laser Damage 2019",
}