Laser micromachining of THz systems

Laser micromachining is a powerful alternative to the conventional fabrication of waveguide structures, feedhorns and backshorts designed to operate at frequencies greater than 800 GHz. Computer controlled laser etching permits the direct scaling and fabrication of successful waveguide designs to THz frequencies with micrometer tolerances in just a few hours. Laser micromachining can also be used to produce quasi optical components such as anti-reflection(AR) grooved silicon lenses, and local oscillator(LO) phase gratings. In these proceedings we describe the specifics of the laser micromachining facility being completed at the Steward Observatory Radio Astronomy Laboratory and its potential for the fabrication of THz imaging array receivers.