Laser micromachining of THz systems

Christian Y.Drouet D'Aubigny, Christopher K. Walker, Brian D. Jones

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Laser micromachining is a powerful alternative to the conventional fabrication of waveguide structures, feedhorns and backshorts designed to operate at frequencies greater than 800 GHz. Computer controlled laser etching permits the direct scaling and fabrication of successful waveguide designs to THz frequencies with micrometer tolerances in just a few hours. Laser micromachining can also be used to produce quasi optical components such as anti-reflection(AR) grooved silicon lenses, and local oscillator(LO) phase gratings. In these proceedings we describe the specifics of the laser micromachining facility being completed at the Steward Observatory Radio Astronomy Laboratory and its potential for the fabrication of THz imaging array receivers.

Original languageEnglish (US)
Pages (from-to)584-588
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2000
EventRadio Telescopes - Munich, Ger
Duration: Mar 27 2000Mar 30 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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