Laser microchemical etching of waveguides and quasi-optical components

Christian Y. Drouët d'Aubigny, Christopher K. Walker, Bryan D. Jones

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations


Laser induced micro chemical etching of silicon can be used to quickly and cheaply machine high-quality three-dimensional structures that would otherwise be nearly impossible to fabricate, in particular THz waveguide structures and quasi-optical components. At the University of Arizona, the construction and characterization of the first laser micro-machining system designed for waveguide components fabrication has been completed. Our system can be used to fabricate focal plane heterodyne mixer arrays, coherent beam combiners, AR grooved silicon lenses, phase gratings, single mode filters and more. Laser micro machining enables the fabrication of three-dimensional structures down to a few microns accuracy and up to 6 inches across in a short time. This presentation discusses the design and performance of our micro-machining system, and illustrates the type, range and performance of quasi-optical components this exciting new technology will make accessible.

Original languageEnglish (US)
Pages (from-to)101-110
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2001
EventMicromachining and Microfabrication Process Technology VII - San Francisco, CA, United States
Duration: Oct 22 2001Oct 24 2001


  • AR
  • Beam combiner
  • FIR
  • Heterodyne mixer array
  • Laser
  • Micro-machining
  • Spatial filtering
  • THz
  • Wave-guide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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