Laser-induced phase transitions of Ge₂Sb₂Te ₅ thin films used in optical and electronic data storage and in thermal lithography

Keyphrases

• Thermal Lithography 100%
• Laser-induced Phase Transition 100%
• SiO2 Dielectric Layer 50%
• Ge2Sb2Te5 Thin Film 50%
• Selective Chemical Etching 50%
• Tightly Focused Laser 50%

Material Science

• Thin Films 100%
• Lithography 100%
• Amorphous Material 33%
• Dielectric Material 33%
• Chalcogenides 33%
• Electron Diffraction 33%
• Electron Microscopy 33%

Engineering

• Electron Diffraction 33%