Large Etendue solid-state-lidar with MEMS-resonant mirror assisted diffractive beam steering by Digital Micro Mirror devices

Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Lieu, Ted Lian Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

By combining a Micro Electro Mechanical System based resonant mirror and a Digital Micromirror Device, we demonstrated a large scan angle, fast scan rate, and high resolution beam steering for the lidar applications. The proposed optical architecture preserves a large Etendue of DMD-based diffractive beam steering with a synchronized short pulsed laser to transition of micromirror array while increasing angular resolution.

Original languageEnglish (US)
Title of host publicationEmerging Digital Micromirror Device Based Systems and Applications XIV
EditorsJohn Ehmke, Benjamin L. Lee
PublisherSPIE
ISBN (Electronic)9781510648999
DOIs
StatePublished - 2022
EventEmerging Digital Micromirror Device Based Systems and Applications XIV 2022 - Virtual, Online
Duration: Feb 20 2022Feb 24 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12014
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceEmerging Digital Micromirror Device Based Systems and Applications XIV 2022
CityVirtual, Online
Period2/20/222/24/22

Keywords

  • DMD
  • Etendue
  • MEMS mirror
  • beam steering
  • lidar
  • solid state lidar
  • time of flight

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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