@inproceedings{263084e089fd4133b1ee44e3be1b2df2,
title = "Ion implantation for figure correction of thin X-ray telescope mirror substrates",
abstract = "Figure correction of X-ray telescope mirrors will be critical for future missions that require high angular resolution and large collecting areas. In this paper, we show that ion implantation offers a method of correcting figure errors by imparting sub-surface in-plane stress in a controllable magnitude and location in Schott D-263 glass, Corning Eagle XG glass, and crystalline silicon substrates. In addition, we can in theory achieve nearly exact corrections in Schott D-263 glass, by controlling the direction of the stress. We show that sufficient stress may be applied to Schott D-263 glass to achieve figure correction in mirrors with simulated initial figure errors. We also report on progress of a system that will be capable of correcting conical shell mirror substrates.",
keywords = "X-ray mirrors, figure correction, glass, ion implantation, mismatch strain, plane stress, silicon",
author = "Brandon Chalifoux and Graham Wright and Heilmann, {Ralf K.} and Schattenburg, {Mark L.}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII ; Conference date: 10-08-2015 Through 13-08-2015",
year = "2015",
doi = "10.1117/12.2189826",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Giovanni Pareschi and O'Dell, {Stephen L.} and Giovanni Pareschi and O'Dell, {Stephen L.}",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII",
}