Investigation of ultrafast laser stress generation in fused silica, Corning Eagle XG glass, Corning ULE glass, and sapphire

Kevin A. Laverty, Daewook Kim, James B. Johnson, Michael A. Echter, Brandon D. Chalifoux

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Previous work has demonstrated the feasibility of using ultrafast laser generated stress to deform fused silica substrates to a desired flatness in a process called ultrafast laser stress figuring (ULSF). Materials other than fused silica may offer superior optomechanical properties that are more suited to certain applications or environments. In this work we explore the stress generated by focused ultrafast laser pulses in several common optical materials: Corning Ultra Low Expansion (ULE) glass, Corning Eagle XG glass, fused silica, and sapphire. Using a laser polarization state perpendicular to the writing direction, we find that the laser induced stress depends on the energy of the ultrafast laser pulses, the distance between two adjacent focused pulses, and the repetition rate at which the pulses are delivered into the material. Each material explored showcases unique dependence on these parameters. The results from this investigation will be used to characterize the potential equivalent material removal rates that would be theoretically achievable by ultrafast laser stress figuring for commercially available sapphire and Eagle XG substrates.

Original languageEnglish (US)
Title of host publicationOptomechanical Engineering 2023
EditorsKeith B. Doyle, Brandon D. Chalifoux, Kenneth R. Castle, Jose M. Sasian
ISBN (Electronic)9781510665521
StatePublished - 2023
EventOptomechanical Engineering 2023 - San Diego, United States
Duration: Aug 23 2023 → …

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceOptomechanical Engineering 2023
Country/TerritoryUnited States
CitySan Diego
Period8/23/23 → …


  • Stress figuring
  • optical figuring
  • ultrafast laser material processing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Investigation of ultrafast laser stress generation in fused silica, Corning Eagle XG glass, Corning ULE glass, and sapphire'. Together they form a unique fingerprint.

Cite this