@inproceedings{9ba65528b4cd4d9aa3b3df977f5c22b2,
title = "Integration of scandium aluminum nitride with silicon nitride for enhanced nonlinear optics",
abstract = "We report on the integration of the second-order nonlinear media ScAlN with the low-loss Si3N4 in a microring resonator platform for enhanced nonlinear optics interaction.",
keywords = "Fabrication, Nonlinear optics, Optical losses, Optical resonators, Photonic band gap, Photonics, Piezoelectricity, Scandium, Scattering, Silicon nitride",
author = "Jiangnan Liu and Shuai Liu and Ding Wang and Zheshen Zhang and Zetian Mi",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2024 {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics, CLEO 2024 ; Conference date: 07-05-2024 Through 10-05-2024",
year = "2024",
doi = "10.1364/cleo\_si.2024.stu3e.6",
language = "English (US)",
series = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
}