Integration of metal-oxide nanobelts with microsystems for sensor applications

Choongho Yu; Qing Hao; Li Shi; Xiangyang Kong; Z. L. Wang

doi:10.1117/12.570971

Integration of metal-oxide nanobelts with microsystems for sensor applications

Choongho Yu
, Qing Hao
, Li Shi
, Xiangyang Kong
, Z. L. Wang

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

Single-crystalline tin dioxide (SnO ₂) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO ₂), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

Original language	English (US)
Article number	23
Pages (from-to)	144-151
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5593
DOIs	https://doi.org/10.1117/12.570971
State	Published - 2004
Externally published	Yes
Event	Nanosensing Materials and Devices - Philadelphia, PA, United States Duration: Oct 25 2004 → Oct 28 2004

Keywords

Dielectrophoresis
Ethanol
Gas sensors
Integration
Metal oxide
Microsystems
NO
Nanobelt
Nanosensors
Poisoning

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.570971

Cite this

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title = "Integration of metal-oxide nanobelts with microsystems for sensor applications",

abstract = "Single-crystalline tin dioxide (SnO 2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO 2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.",

keywords = "Dielectrophoresis, Ethanol, Gas sensors, Integration, Metal oxide, Microsystems, NO, Nanobelt, Nanosensors, Poisoning",

author = "Choongho Yu and Qing Hao and Li Shi and Xiangyang Kong and Wang, \{Z. L.\}",

year = "2004",

doi = "10.1117/12.570971",

language = "English (US)",

volume = "5593",

pages = "144--151",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Nanosensing Materials and Devices ; Conference date: 25-10-2004 Through 28-10-2004",

}

TY - JOUR

T1 - Integration of metal-oxide nanobelts with microsystems for sensor applications

AU - Yu, Choongho

AU - Hao, Qing

AU - Shi, Li

AU - Kong, Xiangyang

AU - Wang, Z. L.

PY - 2004

Y1 - 2004

N2 - Single-crystalline tin dioxide (SnO 2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO 2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

AB - Single-crystalline tin dioxide (SnO 2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO 2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

KW - Dielectrophoresis

KW - Ethanol

KW - Gas sensors

KW - Integration

KW - Metal oxide

KW - Microsystems

KW - NO

KW - Nanobelt

KW - Nanosensors

KW - Poisoning

UR - https://www.scopus.com/pages/publications/17044425693

UR - https://www.scopus.com/pages/publications/17044425693#tab=citedBy

U2 - 10.1117/12.570971

DO - 10.1117/12.570971

M3 - Conference article

AN - SCOPUS:17044425693

SN - 0277-786X

VL - 5593

SP - 144

EP - 151

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 23

T2 - Nanosensing Materials and Devices

Y2 - 25 October 2004 through 28 October 2004

ER -

Integration of metal-oxide nanobelts with microsystems for sensor applications

Abstract

Keywords

ASJC Scopus subject areas

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