@inproceedings{96e069c3871e40eb8bb19642ac4088a2,
title = "Integration of diffractive lenses with addressable vertical-cavity laser arrays",
abstract = "An optical interconnection system is being developed to provide vertical, digital data channels for stacked multichip modules. A key component of the system is an array of individually addressable vertical-cavity surface-emitting lasers with diffractive lenses integrated into the substrate to control beam divergence and direction. The lenses were fabricated by direct- write e-beam lithography and reactive ion beam etching into the GaAs substrate. Preliminary device performance data and the design and fabrication issues are discussed.",
author = "Warren, {Mial E.} and Du, {Tu C.} and Wendt, {Joel R.} and Vawter, {Gregory A.} and Carson, {Richard F.} and Lear, {Kevin L.} and Kilcoyne, {S. P.} and Schneider, {Richard P.} and Zolper, {John C.}",
year = "1995",
language = "English (US)",
isbn = "0819417459",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",
pages = "12--20",
editor = "S.Iraj Najafi and Mahmoud Fallahi and Nasser Peyghambarian",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Circular-Grating Light-Emitting Sources ; Conference date: 06-02-1995 Through 06-02-1995",
}