Integrated micro thermal sensors for local temperature measurements in microsystems

L. Jiang, Y. Wang, M. Wong, Y. Zohar

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Scopus citations


An array of integrated thermal micro sensors was successfully designed, fabricated and characterized for the measurement of temperature distributions in forced convection microchannel flows. Polycrystalline microsensors with the size of 4μmx4μmx0.4μm were suspended across the micro-channels, with hydraulic diameters of less than 3μm, directly exposed to the fluid for local temperature measurements. The fabrication of the integrated microsystem was accomplished using surface micromachining techniques. The sensor sensitivity, time response, accuracy and long term stability are documented. A theoretical analysis of the sensor performance, as part of an integrated microsystem, is presented to provide a framework for the interpretation of the experimental results.

Original languageEnglish (US)
Title of host publicationProceedings of the 1999 3rd ASME/JSME Joint Fluids Engineering Conference, FEDSM'99, San Francisco, California, USA, 18-23 July 1999 (CD-ROM)
PublisherAmerican Society of Mechanical Engineers
Number of pages1
ISBN (Print)0791819612
StatePublished - 1999

ASJC Scopus subject areas

  • General Earth and Planetary Sciences
  • General Engineering
  • General Environmental Science


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