Integrated micro-optical fluorescence detection system for microfluidic electrochromatography

M. E. Warren, W. C. Sweatt, J. R. Wendt, C. G. Bailey, C. M. Matzke, D. W. Arnold, S. A. Kemme, A. A. Allerman, T. R. Carter, R. E. Asbill, S. Samora

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations


We describe the design and microfabrication of an extremely compact optical system as a key element in an integrated capillary-channel electrochromatograph with laser induced fluorescence detection. The optical design uses substrate-mode propagation within the fused silica substrate. The optical system includes a vertical cavity surface-emitting laser (VCSEL) array, two high performance microlenses and a commercial photodetector. The microlenses are multilevel diffractive optics patterned by electron beam lithography and etched by reactive ion etching in fused silica. Two generations of optical subsystems are described. The first generation design is integrated directly onto the capillary channel-containing substrate with a 6 mm separation between the VCSEL and photodetector. The second generation design separates the optical system onto its own module and the source to detector length is further compressed to 3.5 mm. The systems are designed for indirect fluorescence detection using infrared dyes. The first generation design has been tested with a 750 nm VCSEL exciting a 10-4 M solution of CY-7 dye. The observed signal-to-noise ratio of better than 100:1 demonstrates that the background signal from scattered pump light is low despite the compact size of the optical system and meets the system sensitivity requirements.

Original languageEnglish (US)
Pages (from-to)185-192
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 Miniaturized Systems with Micro-Optics and MEMS - Santa Clara, CA, USA
Duration: Sep 2 1999Sep 22 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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