Insulating ultrathin silica films formed by a room-temperature sol-gel process

J. W. Robertson; M. Cai; J. E. Pemberton

doi:10.1002/1521-4095(200105)13:9<662::aid-adma662>3.0.co;2-%23

Insulating ultrathin silica films formed by a room-temperature sol-gel process

J. W. Robertson
, M. Cai
, J. E. Pemberton

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	662-667
Number of pages	6
Journal	Advanced Materials
Volume	13
Issue number	9
DOIs	https://doi.org/10.1002/1521-4095(200105)13:9<662::aid-adma662>3.0.co;2-%23
State	Published - May 3 2001

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/1521-4095(200105)13:9<662::aid-adma662>3.0.co;2-%23

Cite this

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title = "Insulating ultrathin silica films formed by a room-temperature sol-gel process",

author = "Robertson, \{J. W.\} and M. Cai and Pemberton, \{J. E.\}",

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journal = "Advanced Materials",

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AU - Cai, M.

AU - Pemberton, J. E.

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DO - 10.1002/1521-4095(200105)13:9<662::aid-adma662>3.0.co;2-%23

M3 - Article

AN - SCOPUS:0035799607

SN - 0935-9648

VL - 13

SP - 662

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JO - Advanced Materials

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Insulating ultrathin silica films formed by a room-temperature sol-gel process

ASJC Scopus subject areas

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