Instantaneous fluid film imaging in chemical mechanical planarization

Daniel Apone, Caprice Gray, Chris Rogers, Vincent P. Manno, Chris Barns, Mansour Moinpour, Sriram Anjur, Ara Philipossian

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds