Abstract
Ongoing experiments using thin, electrically conducting, transparent layers of Indium Tin Oxide to control the surface potential of thinned CCDs are described. The results are very encouraging, with good uniform ultraviolet sensitivity being obtained from CCDs of different types, and thinned by different processes. The enhanced response is stable in air and in vacuum for periods longer than a year.
Original language | English (US) |
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Pages (from-to) | 517-525 |
Number of pages | 9 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1656 |
DOIs | |
State | Published - Aug 12 1992 |
Externally published | Yes |
Event | High-Resolution Sensors and Hybrid Systems 1992 - San Jose, United States Duration: Feb 9 1992 → Feb 14 1992 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering