Abstract
We report the growth optimization of multiple quantum well and modulator samples containing InAs/GaAs short-period strained-layer superlattice (SPSLS) well using our advanced digitized reflection high-energy electron diffraction (RHEED) system. Modulator samples for both 980 nm and 1.06 μm wavelengths have been investigated. Samples with narrow room temperature absorbance linewidths and rapidly decaying absorbance tails are necessary for state-of-the-art modulators. We have employed various conventional (only As shutter open) and total growth interrupt times (all shutters closed), as well as different InAs and GaAs growth rates in order to optimize the SPSLSs.
Original language | English (US) |
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Pages (from-to) | 1368-1374 |
Number of pages | 7 |
Journal | Journal of Crystal Growth |
Volume | 150 |
DOIs | |
State | Published - 1995 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry