InAs/GaAs short-period strained-layer superlattice modulators grown using advanced digital reflection high-energy electron diffraction techniques

T. C. Hasenberg,, P. Chen, A. Madhukar, A. R. Kost, J. Visher, A. Konkar

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We report the growth optimization of multiple quantum well and modulator samples containing InAs/GaAs short-period strained-layer superlattice (SPSLS) well using our advanced digitized reflection high-energy electron diffraction (RHEED) system. Modulator samples for both 980 nm and 1.06 μm wavelengths have been investigated. Samples with narrow room temperature absorbance linewidths and rapidly decaying absorbance tails are necessary for state-of-the-art modulators. We have employed various conventional (only As shutter open) and total growth interrupt times (all shutters closed), as well as different InAs and GaAs growth rates in order to optimize the SPSLSs.

Original languageEnglish (US)
Pages (from-to)1368-1374
Number of pages7
JournalJournal of Crystal Growth
Volume150
DOIs
StatePublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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