In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization

Jesse Cornely; Chris Rogers; Vincent Manno; Ara Philipossian

doi:10.1557/proc-767-f1.6

In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization

Jesse Cornely
, Chris Rogers
, Vincent Manno
, Ara Philipossian

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	33-46
Number of pages	14
Journal	Materials Research Society Symposium - Proceedings
Volume	767
DOIs	https://doi.org/10.1557/proc-767-f1.6
State	Published - 2003
Externally published	Yes
Event	Chemical-Mechanical Planarization - San Francisco, CA, United States Duration: Apr 22 2003 → Apr 24 2003

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-767-f1.6

Cite this

@article{15dec7c3437046a9958be94ffdb06d43,

title = "In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization",

author = "Jesse Cornely and Chris Rogers and Vincent Manno and Ara Philipossian",

year = "2003",

doi = "10.1557/proc-767-f1.6",

language = "English (US)",

volume = "767",

pages = "33--46",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Chemical-Mechanical Planarization ; Conference date: 22-04-2003 Through 24-04-2003",

}

TY - JOUR

T1 - In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization

AU - Cornely, Jesse

AU - Rogers, Chris

AU - Manno, Vincent

AU - Philipossian, Ara

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0242322635

UR - https://www.scopus.com/pages/publications/0242322635#tab=citedBy

U2 - 10.1557/proc-767-f1.6

DO - 10.1557/proc-767-f1.6

M3 - Conference article

AN - SCOPUS:0242322635

SN - 0272-9172

VL - 767

SP - 33

EP - 46

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Chemical-Mechanical Planarization

Y2 - 22 April 2003 through 24 April 2003

ER -

In Situ Temperature Measurement during Oxide Chemical Mechanical Planarization

ASJC Scopus subject areas

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