Original language | English (US) |
---|---|
Pages (from-to) | 33-46 |
Number of pages | 14 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 767 |
DOIs | |
State | Published - 2003 |
Event | Chemical-Mechanical Planarization - San Francisco, CA, United States Duration: Apr 22 2003 → Apr 24 2003 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering