In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films

Asad Iqbal, Junpin Yao, Harpreet Juneja, Farhang Shadman, Roger P. Sperline

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	2007 AIChE Annual Meeting
State	Published - 2007
Event	2007 AIChE Annual Meeting - Salt Lake City, UT, United States Duration: Nov 4 2007 → Nov 9 2007

Name	AIChE Annual Meeting, Conference Proceedings

ASJC Scopus subject areas

@inproceedings{15014639f8dc4bd7bb027a3127139834,

title = "In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films",

author = "Asad Iqbal and Junpin Yao and Harpreet Juneja and Farhang Shadman and Sperline, {Roger P.}",

year = "2007",

language = "English (US)",

isbn = "9780816910229",

series = "AIChE Annual Meeting, Conference Proceedings",

booktitle = "2007 AIChE Annual Meeting",

note = "2007 AIChE Annual Meeting ; Conference date: 04-11-2007 Through 09-11-2007",

}

TY - GEN

T1 - In-situ characterization of dynamics of impurity absorption and outgassing in porous low-k dielectric thin films

AU - Iqbal, Asad

AU - Yao, Junpin

AU - Juneja, Harpreet

AU - Shadman, Farhang

AU - Sperline, Roger P.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=80053655692&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053655692&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:80053655692

SN - 9780816910229

T3 - AIChE Annual Meeting, Conference Proceedings

BT - 2007 AIChE Annual Meeting

T2 - 2007 AIChE Annual Meeting

Y2 - 4 November 2007 through 9 November 2007

ER -