In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

D. Moszko, O. Faehnle, C. Vogt, D. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.

Original languageEnglish (US)
Title of host publicationEighth European Seminar on Precision Optics Manufacturing
EditorsOliver Fahnle, Gerald Futterer, Rolf Rascher, Alexander Haberl
PublisherSPIE
ISBN (Electronic)9781510645509
DOIs
StatePublished - 2021
Externally publishedYes
Event8th European Seminar on Precision Optics Manufacturing 2021 - Teisnach, Germany
Duration: Apr 13 2021Apr 14 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11853
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference8th European Seminar on Precision Optics Manufacturing 2021
Country/TerritoryGermany
CityTeisnach
Period4/13/214/14/21

Keywords

  • I-tirm
  • Metrology
  • Micro roughness measurement
  • Polishing
  • Tirm

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization'. Together they form a unique fingerprint.

Cite this