TY - JOUR
T1 - Improving CCD quantum efficiency
AU - Lesser, M. P.
N1 - Funding Information:
This work was partially supported by NSF SBIR grant 151-87860599, NASA SBIR grant NAS5-30870 (both the Photometrics/Advanced Technologies), NSF Grant AST-9121801, Steward Observatory, and the Multiple Mirror Telescope Observatory. We wish to thank Ann Bauer, Charles Bridges, Lee Ulrickson, and Tncia Walls of Steward Observatory and David Ouellette of the Multiple Mirror Telescope Observatory who did much of the laboratory work.
Publisher Copyright:
© 1994 SPIE. All rights reserved.
PY - 1994/6/1
Y1 - 1994/6/1
N2 - The enhancement of the quantum efficiency of charge-coupled devices (CCDs) can be accomplished by several methods. The most dramatic increase comes from thinning the CCD for use in the back illuminated mode. Techniques to improve the QE of back illuminated CCDs include the deposition of backside thin film coatings to reduce reflection losses, surface charging to eliminate the backside potential well, and several aspects of device packaging. We have developed processes in these areas which have led to the post-manufacture optimization of devices for astronomical observations. We describe our backside oxidation results and the interaction of the oxide with backside charging, the effect of ion adsorption on backside charging, the development of one and two-layer antireflection coatings, and a new packaging method to improve near-infrared quantum efficiency.
AB - The enhancement of the quantum efficiency of charge-coupled devices (CCDs) can be accomplished by several methods. The most dramatic increase comes from thinning the CCD for use in the back illuminated mode. Techniques to improve the QE of back illuminated CCDs include the deposition of backside thin film coatings to reduce reflection losses, surface charging to eliminate the backside potential well, and several aspects of device packaging. We have developed processes in these areas which have led to the post-manufacture optimization of devices for astronomical observations. We describe our backside oxidation results and the interaction of the oxide with backside charging, the effect of ion adsorption on backside charging, the development of one and two-layer antireflection coatings, and a new packaging method to improve near-infrared quantum efficiency.
UR - http://www.scopus.com/inward/record.url?scp=0009758668&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0009758668&partnerID=8YFLogxK
U2 - 10.1117/12.176777
DO - 10.1117/12.176777
M3 - Conference article
AN - SCOPUS:0009758668
SN - 0277-786X
VL - 2198
SP - 782
EP - 791
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Instrumentation in Astronomy VIII 1994
Y2 - 13 March 1994 through 18 March 1994
ER -