Improving CCD quantum efficiency

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations


The enhancement of the quantum efficiency of charge-coupled devices (CCDs) can be accomplished by several methods. The most dramatic increase comes from thinning the CCD for use in the back illuminated mode. Techniques to improve the QE of back illuminated CCDs include the deposition of backside thin film coatings to reduce reflection losses, surface charging to eliminate the backside potential well, and several aspects of device packaging. We have developed processes in these areas which have led to the post-manufacture optimization of devices for astronomical observations. We describe our backside oxidation results and the interaction of the oxide with backside charging, the effect of ion adsorption on backside charging, the development of one and two-layer antireflection coatings, and a new packaging method to improve near-infrared quantum efficiency.

Original languageEnglish (US)
Pages (from-to)782-791
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Jun 1 1994
EventInstrumentation in Astronomy VIII 1994 - Kailua, Kona, United States
Duration: Mar 13 1994Mar 18 1994

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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