Abstract
We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of A1 patterns lithographically etched on a Si substrate are shown.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 231-235 |
| Number of pages | 5 |
| Journal | Springer Series in Chemical Physics |
| Volume | 79 |
| State | Published - 2004 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physical and Theoretical Chemistry