Abstract
We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of A1 patterns lithographically etched on a Si substrate are shown.
Original language | English (US) |
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Pages (from-to) | 231-235 |
Number of pages | 5 |
Journal | Springer Series in Chemical Physics |
Volume | 79 |
State | Published - 2004 |
Externally published | Yes |
ASJC Scopus subject areas
- Physical and Theoretical Chemistry