Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Ping Zhou; Jim Burge; Chunyu Zhao

doi:10.1117/12.862427

Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Ping Zhou, Jim Burge, Chunyu Zhao

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

15 Scopus citations

Abstract

Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

Original language	English (US)
Title of host publication	Interferometry XV
Subtitle of host publication	Techniques and Analysis
DOIs	https://doi.org/10.1117/12.862427
State	Published - 2010
Event	Interferometry XV: Techniques and Analysis - San Diego, CA, United States Duration: Aug 2 2010 → Aug 4 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7790
ISSN (Print)	0277-786X

Other

Other	Interferometry XV: Techniques and Analysis
Country/Territory	United States
City	San Diego, CA
Period	8/2/10 → 8/4/10

Keywords

CGH
Edge diffraction
Imaging aberration
Phase smoothing
Talbot effect
Transfer function

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.862427

Cite this

Zhou, P, Burge, J & Zhao, C 2010, Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors. in Interferometry XV: Techniques and Analysis., 77900L, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7790, Interferometry XV: Techniques and Analysis, San Diego, CA, United States, 8/2/10. https://doi.org/10.1117/12.862427

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abstract = "Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.",

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author = "Ping Zhou and Jim Burge and Chunyu Zhao",

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AU - Zhou, Ping

AU - Burge, Jim

AU - Zhao, Chunyu

PY - 2010

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N2 - Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

AB - Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

KW - CGH

KW - Edge diffraction

KW - Imaging aberration

KW - Phase smoothing

KW - Talbot effect

KW - Transfer function

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M3 - Conference contribution

AN - SCOPUS:77956736219

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Interferometry XV

T2 - Interferometry XV: Techniques and Analysis

Y2 - 2 August 2010 through 4 August 2010

ER -

Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

Abstract

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Keywords

ASJC Scopus subject areas

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