Hybrid electro-optic polymer/sol-gel waveguide modulator fabricated by all-wet etching process

Y. Enami; G. Meredith; N. Peyghambarian; A. K.Y. Jen

doi:10.1063/1.1630850

Hybrid electro-optic polymer/sol-gel waveguide modulator fabricated by all-wet etching process

Y. Enami, G. Meredith, N. Peyghambarian, A. K.Y. Jen

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35 Scopus citations

Abstract

The fabrication of a hybrid electro-optic polymer (EOP)/sol-gel waveguide modulator by all-wet etching process was discussed. Sol-gel overcladding was used. Optical confinement in the EOP that enables adiabatic transition between the waveguides was also discussed. It was found that hybrid approach has advantages for coupling loss, waveguide and signal stability. The results also show that if thickness of the EOP was increased to 0.9 μm in a laterally confined structure it reduces the V _π to 22 V.

Original language	English (US)
Pages (from-to)	4692-4694
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	23
DOIs	https://doi.org/10.1063/1.1630850
State	Published - Dec 8 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "The fabrication of a hybrid electro-optic polymer (EOP)/sol-gel waveguide modulator by all-wet etching process was discussed. Sol-gel overcladding was used. Optical confinement in the EOP that enables adiabatic transition between the waveguides was also discussed. It was found that hybrid approach has advantages for coupling loss, waveguide and signal stability. The results also show that if thickness of the EOP was increased to 0.9 μm in a laterally confined structure it reduces the V π to 22 V.",

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AU - Peyghambarian, N.

AU - Jen, A. K.Y.

PY - 2003/12/8

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AB - The fabrication of a hybrid electro-optic polymer (EOP)/sol-gel waveguide modulator by all-wet etching process was discussed. Sol-gel overcladding was used. Optical confinement in the EOP that enables adiabatic transition between the waveguides was also discussed. It was found that hybrid approach has advantages for coupling loss, waveguide and signal stability. The results also show that if thickness of the EOP was increased to 0.9 μm in a laterally confined structure it reduces the V π to 22 V.

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Hybrid electro-optic polymer/sol-gel waveguide modulator fabricated by all-wet etching process

Abstract

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