Abstract
The highly efficient near-field probes are discussed. In the near-field optical system, the object and the optical system must be closer than the wavelength of light that was used to illuminate the object. The fabrication procedure involves a photoresist exposure, development, and ion milling, with which the glass was etched into the desired probe tip array. It was found that a combination of dielectric apertures and solid immersion lens optics provide both a small spot size and high coupling efficiency.
Original language | English (US) |
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Pages | 38 |
Number of pages | 1 |
Volume | 12 |
No | 12 |
Specialist publication | Optics and Photonics News |
DOIs | |
State | Published - Dec 2001 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering