High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography

Yick Chuen Chan; Yi Kuen Lee; Man Wong; Yitshak Zohar

High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography

Yick Chuen Chan, Yi Kuen Lee, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new technology approach for the design, fabrication and application of an integrated free-solution electrophoresis microsystem is presented. The technology approach, which utilizes the dual-photolithography provided from a stepper and a contact aligner, allows fast and flexible formation of sub-micron pillar array patterns on a silicon substrate. Combining with standard microfabrication technique and deep-reactive-ion-etching (DRIE), very high aspect-ratio sub-micron pillar arrays can be integrated in regular microfluidic system for free-solution DNA electrophoresis. DNA interaction with pillars inside the microsystem has been demonstrated, supporting the new technology approach a novel technique for Si-based free-solution electrophoresis microsystem fabrication.

Original language	English (US)
Title of host publication	2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Pages	101-104
Number of pages	4
State	Published - 2005
Event	2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China Duration: Jul 5 2005 → Jul 9 2005

Publication series

Name	2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Volume	2005

Other

Other	2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Country/Territory	China
City	Shatin, N.T.
Period	7/5/05 → 7/9/05

ASJC Scopus subject areas

Engineering(all)

Cite this

High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography. / Chan, Yick Chuen; Lee, Yi Kuen; Wong, Man; Zohar, Yitshak.

2005 IEEE International Conference on Robotics and Biomimetics, ROBIO. 2005. p. 101-104 1708604 (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chan, YC, Lee, YK, Wong, M & Zohar, Y 2005, High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography. in 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO., 1708604, 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, vol. 2005, pp. 101-104, 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, Shatin, N.T., China, 7/5/05.

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abstract = "A new technology approach for the design, fabrication and application of an integrated free-solution electrophoresis microsystem is presented. The technology approach, which utilizes the dual-photolithography provided from a stepper and a contact aligner, allows fast and flexible formation of sub-micron pillar array patterns on a silicon substrate. Combining with standard microfabrication technique and deep-reactive-ion-etching (DRIE), very high aspect-ratio sub-micron pillar arrays can be integrated in regular microfluidic system for free-solution DNA electrophoresis. DNA interaction with pillars inside the microsystem has been demonstrated, supporting the new technology approach a novel technique for Si-based free-solution electrophoresis microsystem fabrication.",

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AB - A new technology approach for the design, fabrication and application of an integrated free-solution electrophoresis microsystem is presented. The technology approach, which utilizes the dual-photolithography provided from a stepper and a contact aligner, allows fast and flexible formation of sub-micron pillar array patterns on a silicon substrate. Combining with standard microfabrication technique and deep-reactive-ion-etching (DRIE), very high aspect-ratio sub-micron pillar arrays can be integrated in regular microfluidic system for free-solution DNA electrophoresis. DNA interaction with pillars inside the microsystem has been demonstrated, supporting the new technology approach a novel technique for Si-based free-solution electrophoresis microsystem fabrication.

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M3 - Conference contribution

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BT - 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO

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ER -

High-throughput fabrication of sub-micron pillar arrays for free-solution DNA electrophoresis without e-beam lithography

Abstract

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Other

ASJC Scopus subject areas

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