High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa; Jose Sasian; Francy K. Abraham

doi:10.1117/1.3574399

High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa, Jose Sasian, Francy K. Abraham

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

Original language	English (US)
Article number	053603
Journal	Optical Engineering
Volume	50
Issue number	5
DOIs	https://doi.org/10.1117/1.3574399
State	Published - May 2011

Keywords

3D shape measurement
Fourier transform profilometry
machine vision

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Engineering

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10.1117/1.3574399

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title = "High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles",

abstract = "We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.",

keywords = "3D shape measurement, Fourier transform profilometry, machine vision",

author = "Takeshi Nakazawa and Jose Sasian and Abraham, {Francy K.}",

note = "Funding Information: We gratefully acknowledge support of Intel Corporation.",

year = "2011",

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AU - Nakazawa, Takeshi

AU - Sasian, Jose

AU - Abraham, Francy K.

N1 - Funding Information: We gratefully acknowledge support of Intel Corporation.

PY - 2011/5

Y1 - 2011/5

N2 - We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

AB - We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

KW - 3D shape measurement

KW - Fourier transform profilometry

KW - machine vision

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JO - Optical Engineering

JF - Optical Engineering

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ER -

High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Abstract

Keywords

ASJC Scopus subject areas

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