High-speed 3-D optical metrology and applications

Song Zhang; Rongguang Liang; Lianxiang Yang

doi:10.1117/1.OE.53.11.112201

High-speed 3-D optical metrology and applications

Song Zhang, Rongguang Liang, Lianxiang Yang

Optical Sciences

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Article number	112201
Journal	Optical Engineering
Volume	53
Issue number	11
DOIs	https://doi.org/10.1117/1.OE.53.11.112201
State	Published - Nov 1 2014

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering(all)

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10.1117/1.OE.53.11.112201

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@article{b9102aa05ef540009609b80fbedd5947,

title = "High-speed 3-D optical metrology and applications",

author = "Song Zhang and Rongguang Liang and Lianxiang Yang",

year = "2014",

month = nov,

day = "1",

doi = "10.1117/1.OE.53.11.112201",

language = "English (US)",

volume = "53",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "11",

}

TY - JOUR

T1 - High-speed 3-D optical metrology and applications

AU - Zhang, Song

AU - Liang, Rongguang

AU - Yang, Lianxiang

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DO - 10.1117/1.OE.53.11.112201

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VL - 53

JO - Optical Engineering

JF - Optical Engineering

IS - 11

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ER -

High-speed 3-D optical metrology and applications

ASJC Scopus subject areas

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