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High sensitivity, high bandwidth photonic integrated optomechanical accelerometer: A numerical approach

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a theoretical and numerical investigation of a novel photonic integrated optomechanical accelerometer, which utilizes the elasto-optic effect in a silicon nitride racetrack resonator for precise motion detection. The study combines finite-element analysis using COMSOL Multiphysics, coupling structural mechanics, wave optics at telecom wavelengths, and heat transfer in solids to estimate key performance metrics based on realistic material parameters. We estimate an optomechanical coupling constant of 0.8 MHz per nanometer, along with high mechanical and optical quality factors. Our predictions indicate a shot noise-limited displacement resolution at the femtometer level, and acceleration noise floors below 300 nano-g across a 15 kHz bandwidth. These results represent a state-of-the-art performance, placing this proposed accelerometer among the best integrated optomechanical accelerometers with comparable bandwidth and footprint.

Original languageEnglish (US)
Title of host publicationOptical Modeling and Performance Predictions XV
EditorsMark A. Kahan, Catherine Merrill
PublisherSPIE
ISBN (Electronic)9781510690967
DOIs
StatePublished - Sep 16 2025
Event15th Optical Modeling and Performance Predictions - San Diego, United States
Duration: Aug 4 2025Aug 4 2025

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13594
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference15th Optical Modeling and Performance Predictions
Country/TerritoryUnited States
CitySan Diego
Period8/4/258/4/25

Keywords

  • Photonic integrated circuits
  • optomechanical accelerometer
  • precision sensing
  • silicon nitride photonics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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