High resolution semiconductor inspection by using solid immersion lenses

Jun Zhang; Yullin Kim; Youngsik Kim; Roberto Valencia; Tom D. Milster; Dave Dozer

doi:10.1143/JJAP.48.03A043

High resolution semiconductor inspection by using solid immersion lenses

Jun Zhang, Yullin Kim, Youngsik Kim, Roberto Valencia, Tom D. Milster, Dave Dozer

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A near-field subsurface (100 μm) microscope with numerical aperture (NA) = 2:45 is developed for integrated circuit (IC) inspection by using silicon solid immersion lenses (SIL). It is optimized for imaging patterns underneath the surface (around 100 μm deep). With the illumination light at 1.2 μm, a lateral resolution of better than 300nm is experimentally demonstrated. Gap control and tilt servos are suggested for the possibility of dynamic imaging.

Original language	English (US)
Article number	03A043
Journal	Japanese Journal of Applied Physics
Volume	48
Issue number	3 PART 2
DOIs	https://doi.org/10.1143/JJAP.48.03A043
State	Published - Mar 2009

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/JJAP.48.03A043

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title = "High resolution semiconductor inspection by using solid immersion lenses",

abstract = "A near-field subsurface (100 μm) microscope with numerical aperture (NA) = 2:45 is developed for integrated circuit (IC) inspection by using silicon solid immersion lenses (SIL). It is optimized for imaging patterns underneath the surface (around 100 μm deep). With the illumination light at 1.2 μm, a lateral resolution of better than 300nm is experimentally demonstrated. Gap control and tilt servos are suggested for the possibility of dynamic imaging.",

author = "Jun Zhang and Yullin Kim and Youngsik Kim and Roberto Valencia and Milster, {Tom D.} and Dave Dozer",

year = "2009",

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language = "English (US)",

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AU - Valencia, Roberto

AU - Milster, Tom D.

AU - Dozer, Dave

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High resolution semiconductor inspection by using solid immersion lenses

Abstract

ASJC Scopus subject areas

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