High-resolution optical lithography with a near-field scanning subwavelength aperture

Fred F. Froehlich, Tom D. Milster, R. Uber

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Fingerprint

Dive into the research topics of 'High-resolution optical lithography with a near-field scanning subwavelength aperture'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds