High-resolution imaging system using a tabletop extreme ultraviolet source

Xiaoshi Zhang, Daisy Raymondson, Arvinder S. Sandhu, Sterling Backus, Yanwei Liu, David T. Attwood, Margaret M. Murnane, Henry C. Kapteyn, Ariel R. Libertun

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


We present a simple setup for obtaining high resolution, sub-micron images using high harmonic generation (HHG) in a hollow-core waveguide as a light source. We demonstrate imaging with illumination at a wavelength of 30 nm using an all-reflective, double-multilayer mirror setup and a CCD camera as a recording device. For the magnifications of up to 50x used here, the all-reflective setup has advantages over zone plate microscopes because of the much larger working distances that allow for imaging of plasmas. This setup has also a throughput that is higher by at least a factor of three compared to zone-plate microscopes, and presents the additional advantage of preserving the temporal pulse width of the harmonics because diffractive optics are not used. This work demonstrates the feasibility of high-spatial-resolution, time-resolved, EUV imaging of plasmas and other objects using a tabletop compact light source.

Original languageEnglish (US)
Article number06
Pages (from-to)47-52
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventFourth Generation X-Ray Sources and Optics II - Denver, CO, United States
Duration: Aug 2 2004Aug 3 2004


  • EUV imaging
  • EUV microscopy
  • HHG
  • High Harmonic applications
  • Imaging
  • Time resolved EUV imaging
  • Time resolved plasma dynamics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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