High-Q microring resonator on hybrid Si3N4/ScAlN platform

Jiangnan Liu; Shuai Liu; Abdur Raheem Al-Hallak; Pierre Luc Thériault; You Wu; Stéphane Kena-Cohen; Mack Kira; Moe Soltani; Zheshen Zhang; Zetian Mi

doi:10.1109/IPC60965.2024.10799800

High-Q microring resonator on hybrid Si₃N₄/ScAlN platform

Jiangnan Liu
, Shuai Liu
, Abdur Raheem Al-Hallak
, Pierre Luc Thériault
, You Wu
, Stéphane Kena-Cohen
, Mack Kira
, Moe Soltani
, Zheshen Zhang
, Zetian Mi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

A high-Q microring resonator based on a hybrid structure of ScAlN integrated with Si₃N₄ is reported with intrinsic Q-factor up to 1.4

Original language	English (US)
Title of host publication	2024 IEEE Photonics Conference, IPC 2024 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9798350361957
DOIs	https://doi.org/10.1109/IPC60965.2024.10799800
State	Published - 2024
Externally published	Yes
Event	2024 IEEE Photonics Conference, IPC 2024 - Rome, Italy Duration: Nov 10 2024 → Nov 14 2024

Publication series

Name	2024 IEEE Photonics Conference, IPC 2024 - Proceedings

Conference

Conference	2024 IEEE Photonics Conference, IPC 2024
Country/Territory	Italy
City	Rome
Period	11/10/24 → 11/14/24

Keywords

ScAlN
high-Q ring resonator
nonlinear optics

ASJC Scopus subject areas

Computer Networks and Communications
Hardware and Architecture
Signal Processing
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/IPC60965.2024.10799800

Cite this

Liu, J., Liu, S., Al-Hallak, A. R., Thériault, P. L., Wu, Y., Kena-Cohen, S., Kira, M., Soltani, M., Zhang, Z., & Mi, Z. (2024). High-Q microring resonator on hybrid Si₃N₄/ScAlN platform. In 2024 IEEE Photonics Conference, IPC 2024 - Proceedings (2024 IEEE Photonics Conference, IPC 2024 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPC60965.2024.10799800

High-Q microring resonator on hybrid Si₃N₄/ScAlN platform. / Liu, Jiangnan; Liu, Shuai; Al-Hallak, Abdur Raheem et al.
2024 IEEE Photonics Conference, IPC 2024 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2024. (2024 IEEE Photonics Conference, IPC 2024 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liu, J, Liu, S, Al-Hallak, AR, Thériault, PL, Wu, Y, Kena-Cohen, S, Kira, M, Soltani, M, Zhang, Z & Mi, Z 2024, High-Q microring resonator on hybrid Si₃N₄/ScAlN platform. in 2024 IEEE Photonics Conference, IPC 2024 - Proceedings. 2024 IEEE Photonics Conference, IPC 2024 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2024 IEEE Photonics Conference, IPC 2024, Rome, Italy, 11/10/24. https://doi.org/10.1109/IPC60965.2024.10799800

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title = "High-Q microring resonator on hybrid Si3N4/ScAlN platform",

abstract = "A high-Q microring resonator based on a hybrid structure of ScAlN integrated with Si3N4 is reported with intrinsic Q-factor up to 1.4",

keywords = "ScAlN, high-Q ring resonator, nonlinear optics",

author = "Jiangnan Liu and Shuai Liu and Al-Hallak, \{Abdur Raheem\} and Th{\'e}riault, \{Pierre Luc\} and You Wu and St{\'e}phane Kena-Cohen and Mack Kira and Moe Soltani and Zheshen Zhang and Zetian Mi",

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year = "2024",

doi = "10.1109/IPC60965.2024.10799800",

language = "English (US)",

series = "2024 IEEE Photonics Conference, IPC 2024 - Proceedings",

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AU - Liu, Jiangnan

AU - Liu, Shuai

AU - Al-Hallak, Abdur Raheem

AU - Thériault, Pierre Luc

AU - Wu, You

AU - Kena-Cohen, Stéphane

AU - Kira, Mack

AU - Soltani, Moe

AU - Zhang, Zheshen

AU - Mi, Zetian

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AB - A high-Q microring resonator based on a hybrid structure of ScAlN integrated with Si3N4 is reported with intrinsic Q-factor up to 1.4

KW - ScAlN

KW - high-Q ring resonator

KW - nonlinear optics

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DO - 10.1109/IPC60965.2024.10799800

M3 - Conference contribution

AN - SCOPUS:85215519264

T3 - 2024 IEEE Photonics Conference, IPC 2024 - Proceedings

BT - 2024 IEEE Photonics Conference, IPC 2024 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2024 IEEE Photonics Conference, IPC 2024

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