TY - JOUR
T1 - High-pressure phase equilibria for chlorosilane + carbon dioxide mixtures
AU - Vyhmeister, Eduardo
AU - Muscat, Anthony J.
AU - Suleiman, David
AU - Estévez, L. Antonio
N1 - Funding Information:
Financial support from the NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (EEC-9528813/2001-MC-425) is gratefully acknowledged. Collaboration between the Department of Chemical and Environmental Engineering of the University of Arizona and the Department of Chemical Engineering of the University of Puerto Rico through this grant has made this investigation possible. LAE is grateful to the Dave C. Swalm School of Chemical Engineering at Mississippi State University for providing a stimulating environment for research during his sabbatical leave (August 2007–June 2008).
PY - 2008/8/25
Y1 - 2008/8/25
N2 - Fluid-phase equilibria, including dew points, bubble points, and critical points were measured for four binary systems composed of a chlorosilane and carbon dioxide. The measurements were carried out in a constant-composition, variable-volume cell equipped with a sapphire window, which allowed visual observation of the phases in the cell. A syringe pump was used to inject the CO2 into the cell and to control its pressure. Methyltrichlorosilane, dimethyldichlorosilane, trimethylchlorosilane, and diethyldichlorosilane up to about 0.14 mol fraction were studied in this apparatus and a total of 243 phase-boundary points were obtained. Displacements in the critical point with respect to pure CO2 of up to 11.81 MPa and 348.05 K were observed. Modeling of the fluid-phase equilibria for three of the four binary systems was done using the Peng-Robinson equation of state, standard van der Waals mixing rules with two binary interaction parameters, and a φ-φ formulation of the equilibrium. The binary interaction parameters were obtained by fitting the model to the experimental data. The model produced excellent agreement between computed and experimental data. Graphical representations of the modeling results are presented and compared to experimental results. The results indicate that the largest chlorosilane (diethyldichlorosilane) produced the largest shift in critical pressure and critical temperature with respect to pure CO2.
AB - Fluid-phase equilibria, including dew points, bubble points, and critical points were measured for four binary systems composed of a chlorosilane and carbon dioxide. The measurements were carried out in a constant-composition, variable-volume cell equipped with a sapphire window, which allowed visual observation of the phases in the cell. A syringe pump was used to inject the CO2 into the cell and to control its pressure. Methyltrichlorosilane, dimethyldichlorosilane, trimethylchlorosilane, and diethyldichlorosilane up to about 0.14 mol fraction were studied in this apparatus and a total of 243 phase-boundary points were obtained. Displacements in the critical point with respect to pure CO2 of up to 11.81 MPa and 348.05 K were observed. Modeling of the fluid-phase equilibria for three of the four binary systems was done using the Peng-Robinson equation of state, standard van der Waals mixing rules with two binary interaction parameters, and a φ-φ formulation of the equilibrium. The binary interaction parameters were obtained by fitting the model to the experimental data. The model produced excellent agreement between computed and experimental data. Graphical representations of the modeling results are presented and compared to experimental results. The results indicate that the largest chlorosilane (diethyldichlorosilane) produced the largest shift in critical pressure and critical temperature with respect to pure CO2.
KW - Chlorosilane
KW - Critical locus
KW - Diethyldichlorosilane
KW - Dimethyldichlorosilane
KW - Fluid-phase equilibrium
KW - Methyltrichlorosilane
KW - Mixture critical point
KW - Supercritical carbon dioxide
KW - Trimethylchlorosilane
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U2 - 10.1016/j.fluid.2008.06.017
DO - 10.1016/j.fluid.2008.06.017
M3 - Article
AN - SCOPUS:49549083238
SN - 0378-3812
VL - 270
SP - 121
EP - 128
JO - Fluid Phase Equilibria
JF - Fluid Phase Equilibria
IS - 1-2
ER -