High-efficiency subwavelength diffractive optical element in gaas for 975 nm

Keyphrases

• Gallium Arsenide 100%
• High Efficiency 100%
• Subwavelength 100%
• Diffractive Optics 100%
• Grating 50%
• Blazed Transmission Grating 50%
• Diffraction 50%
• Electron Beam Lithography 50%
• Transmission Measurement 50%
• Light Wavelength 50%
• Binary Phase 50%
• Effective Index 50%
• Surface Relief 50%
• Rigorous Coupled-wave Analysis 50%
• Phase Profile 50%
• Direct Ink Writing 50%
• Relief Feature 50%
• Reactive Ion Beam Etching 50%

Engineering

• Transmissions 100%
• Optical Element 100%
• Gallium Arsenide 50%
• Electron Optical Lithography 50%
• Effective Index 50%

Material Science

• Gallium Arsenide 100%
• Lithography 100%