Abstract
We have fabricated subwavelength diffractive optical elements with binary phase profiles for operation at 975 nm. The individual surface-relief features of the elements are smaller than the wavelength of light in the material. By modulating the size and spacing of the features we form artificial, gradient, effective index-ofrefraction surfaces. The blazed transmission gratings were designed with rigorous coupled-wave analysis and fabricated by direct-write electron-beam lithography and reactive ion-beam etching in GaAs. The gratings have minimum features 63 nm wide. Transmission measurements show 85% diffraction eff iciency into the f irst order.
Original language | English (US) |
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Pages (from-to) | 1441-1443 |
Number of pages | 3 |
Journal | Optics letters |
Volume | 20 |
Issue number | 12 |
DOIs | |
State | Published - Jun 15 1995 |
Externally published | Yes |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics