High-efficiency subwavelength diffractive optical element in gaas for 975 nm

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt

Research output: Contribution to journalArticlepeer-review

45 Scopus citations


We have fabricated subwavelength diffractive optical elements with binary phase profiles for operation at 975 nm. The individual surface-relief features of the elements are smaller than the wavelength of light in the material. By modulating the size and spacing of the features we form artificial, gradient, effective index-ofrefraction surfaces. The blazed transmission gratings were designed with rigorous coupled-wave analysis and fabricated by direct-write electron-beam lithography and reactive ion-beam etching in GaAs. The gratings have minimum features 63 nm wide. Transmission measurements show 85% diffraction eff iciency into the f irst order.

Original languageEnglish (US)
Pages (from-to)1441-1443
Number of pages3
JournalOptics letters
Issue number12
StatePublished - Jun 15 1995
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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