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High dose implant strip in FEOL IC manufacturing using a combination of cryogenic and wet cleaning techniques

  • Souvik Banerjee
  • , Ramesli Borade
  • , Masanobu Sato
  • , Sadao Hirae
  • , Peggi Cross
  • , Srini Raghavan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6   Link opens in a new tab Scopus citations

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