Fingerprint
Dive into the research topics of 'High dose implant strip in FEOL IC manufacturing using a combination of cryogenic and wet cleaning techniques'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
High dose implant strip in FEOL IC manufacturing using a combination of cryogenic and wet cleaning techniques
Souvik Banerjee, Ramesli Borade, Masanobu Sato, Sadao Hirae, Peggi Cross, Srini Raghavan
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
6
Scopus
citations