High accuracy, wide range, rotation angle measurement by the use of two parallel interference patterns

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, Takamasa Suzuki

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

Based on the idea of measuring small rotation angles with a parallel interference pattern (PIP), a method is developed to measure large rotation angles accurately. Two parallel PIP’s that have different periods are used to measure a rotation angle of an object. The measurement made with a small-period PIP provides a high accuracy, and the measurement made with a large-period PIP provides a wide range. An accurate measurement for wide-range angles is made by combining the two measured values. The accuracy of the phase detection is determined by the periods of two PIP’s. Rotation angles from approximately 230 to 30 arc min can be measured with an accuracy of 0.2 arc sec. Analytical results are supported by experimental results.

Original languageEnglish (US)
Pages (from-to)6190-6195
Number of pages6
JournalApplied optics
Volume36
Issue number25
DOIs
StatePublished - Sep 1 1997

Keywords

  • High accuracy
  • Interferometry
  • Rotation angles
  • Wide range

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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