High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner; Gar Wing Truong; David Follman; Maximilian Prinz; Georg Winkler; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner
, Gar Wing Truong
, David Follman
, Maximilian Prinz
, Georg Winkler
, Stephan Puchegger
, Garrett D. Cole
, Oliver H. Heckl

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Original language	English (US)
Title of host publication	2023 Conference on Lasers and Electro-Optics, CLEO 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781957171258
State	Published - 2023
Externally published	Yes
Event	2023 Conference on Lasers and Electro-Optics, CLEO 2023 - San Jose, United States Duration: May 7 2023 → May 12 2023

Publication series

Name	2023 Conference on Lasers and Electro-Optics, CLEO 2023

Conference

Conference	2023 Conference on Lasers and Electro-Optics, CLEO 2023
Country/Territory	United States
City	San Jose
Period	5/7/23 → 5/12/23

ASJC Scopus subject areas

Artificial Intelligence
Computer Science Applications
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

Perner, L. W., Truong, G. W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D., & Heckl, O. H. (2023). High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. In 2023 Conference on Lasers and Electro-Optics, CLEO 2023 Article SM4H.4 (2023 Conference on Lasers and Electro-Optics, CLEO 2023). Institute of Electrical and Electronics Engineers Inc..

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. / Perner, Lukas W.; Truong, Gar Wing; Follman, David et al.
2023 Conference on Lasers and Electro-Optics, CLEO 2023. Institute of Electrical and Electronics Engineers Inc., 2023. SM4H.4 (2023 Conference on Lasers and Electro-Optics, CLEO 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Perner, LW, Truong, GW, Follman, D, Prinz, M, Winkler, G, Puchegger, S, Cole, GD & Heckl, OH 2023, High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. in 2023 Conference on Lasers and Electro-Optics, CLEO 2023., SM4H.4, 2023 Conference on Lasers and Electro-Optics, CLEO 2023, Institute of Electrical and Electronics Engineers Inc., 2023 Conference on Lasers and Electro-Optics, CLEO 2023, San Jose, United States, 5/7/23.

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title = "High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures",

abstract = "We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.",

author = "Perner, \{Lukas W.\} and Truong, \{Gar Wing\} and David Follman and Maximilian Prinz and Georg Winkler and Stephan Puchegger and Cole, \{Garrett D.\} and Heckl, \{Oliver H.\}",

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T1 - High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

AU - Perner, Lukas W.

AU - Truong, Gar Wing

AU - Follman, David

AU - Prinz, Maximilian

AU - Winkler, Georg

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2023

Y1 - 2023

N2 - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

AB - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

UR - https://www.scopus.com/pages/publications/85176300712

UR - https://www.scopus.com/pages/publications/85176300712#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:85176300712

T3 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

BT - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

Y2 - 7 May 2023 through 12 May 2023

ER -

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Abstract

Publication series

Conference

ASJC Scopus subject areas

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Cite this