@inproceedings{282e9fdc1ba143f3ad0716d14f9e9058,
title = "Geometrical error calibration in reflective surface testing based on reverse Hartmann test",
abstract = "In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.",
keywords = "computer-aided optimization, deflectometrygeometrical error calibration, surface testing",
author = "Zhidong Gong and Daodang Wang and Ping Xu and Chao Wang and Rongguang Liang and Ming Kong and Jun Zhao and Linhai Mo and Shuhui Mo",
note = "Funding Information: The activities of this work are supported by Zhejiang Provincial Natural Science Foundation of China (LY17E050014), National Natural Science Foundation of China (NSFC) (51375467, 11404312, 51476154, 51404223), Zhejiang Key Discipline of Instrument Science and Technology (JL150508). Publisher Copyright: {\textcopyright} 2017 SPIE.; Applied Optical Metrology II 2017 ; Conference date: 08-08-2017 Through 09-08-2017",
year = "2017",
doi = "10.1117/12.2268372",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Trolinger, {James D.} and Erik Novak",
booktitle = "Applied Optical Metrology II",
}