Abstract
This paper gives a treatment for finding 3rd order aberrations in solid-immersion lenses (SILs) using spherical-aberration as the basis for a polynomial power expansion of the wavefront. Unlike previous work, the treatment is general for any incident and lens media, for any lens thickness, and for any chief-ray specification. Using this treatment, a tolerance analysis is given with emphasis on thickness tolerance and limitations on field of view. Major findings include tight thickness tolerance for high-index hyperhemispheres and a tolerance window for hemispheres centered about a thickness less than the radius of curvature of the lens.
Original language | English (US) |
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Pages (from-to) | 20008-20028 |
Number of pages | 21 |
Journal | Optics Express |
Volume | 16 |
Issue number | 24 |
DOIs | |
State | Published - Nov 24 2008 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics