Gas-phase Wafer Cleaning Technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English (US)
Title of host publication	Handbook of Silicon Wafer Cleaning Technology
Subtitle of host publication	Second Edition
Publisher	Elsevier Inc.
Pages	269-353
Number of pages	85
ISBN (Electronic)	9780815517733
ISBN (Print)	9780815515548
DOIs	https://doi.org/10.1016/B978-081551554-8.50008-2
State	Published - Jan 10 2008
Externally published	Yes

ASJC Scopus subject areas

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title = "Gas-phase Wafer Cleaning Technology",

author = "Butterbaugh, \{Jeffery W.\} and Muscat, \{Anthony J.\}",

year = "2008",

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day = "10",

doi = "10.1016/B978-081551554-8.50008-2",

language = "English (US)",

isbn = "9780815515548",

pages = "269--353",

booktitle = "Handbook of Silicon Wafer Cleaning Technology",

publisher = "Elsevier Inc.",

}

TY - CHAP

T1 - Gas-phase Wafer Cleaning Technology

AU - Butterbaugh, Jeffery W.

AU - Muscat, Anthony J.

PY - 2008/1/10

Y1 - 2008/1/10

UR - https://www.scopus.com/pages/publications/79959472265

UR - https://www.scopus.com/pages/publications/79959472265#tab=citedBy

U2 - 10.1016/B978-081551554-8.50008-2

DO - 10.1016/B978-081551554-8.50008-2

M3 - Chapter

AN - SCOPUS:79959472265

SN - 9780815515548

SP - 269

EP - 353

BT - Handbook of Silicon Wafer Cleaning Technology

PB - Elsevier Inc.

ER -