Physics & Astronomy
atoms
10%
chambers
16%
chemistry
8%
cleaning
10%
contaminants
10%
copper
7%
copper oxides
11%
costs
7%
etching
7%
fluorocarbons
13%
hardware
9%
hydrogen
6%
maintenance
10%
metals
10%
mixed oxides
12%
modules
8%
oxides
6%
photochemical reactions
11%
photoelectron spectroscopy
8%
preparation
82%
reactors
85%
silicon
16%
stopping
10%
tubes
7%
ultrahigh vacuum
10%
vacuum
6%
vacuum chambers
10%
vacuum deposition
12%
vapor phases
90%
vapors
23%
x ray spectroscopy
10%
Engineering & Materials Science
Atoms
26%
Cleaning
11%
Computer hardware
7%
Copper
10%
Copper oxides
18%
Etching
13%
Fluorocarbons
18%
Gases
64%
Hydrogen
9%
Impurities
12%
Metals
16%
Oxides
21%
Photochemical reactions
21%
Photoelectron spectroscopy
21%
Semiconductor materials
100%
Silicon
29%
Surface analysis
32%
Ultrahigh vacuum
19%
Vacuum
22%
Vacuum deposition
21%
Vapors
33%
X rays
11%