TY - GEN
T1 - GaP-On-Insulator as a Platform for Integrated Photonics
AU - Honl, Simon
AU - Schneider, Katharina
AU - Welter, Pol
AU - Baumgartner, Yannick
AU - Hahn, Herwig
AU - Czornomaz, Lukas
AU - Wilson, Dalziel J.
AU - Seidler, Paul
N1 - Publisher Copyright:
© 2018 OSA.
PY - 2018/8/6
Y1 - 2018/8/6
N2 - We present a complete process flow for fabrication of integrated GaP-on-insulator photonic devices via direct wafer bonding of epitaxial films. High-fidelity patterning enables a range of applications, such as waveguide resonators and photonic crystal cavities.
AB - We present a complete process flow for fabrication of integrated GaP-on-insulator photonic devices via direct wafer bonding of epitaxial films. High-fidelity patterning enables a range of applications, such as waveguide resonators and photonic crystal cavities.
UR - http://www.scopus.com/inward/record.url?scp=85052585594&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85052585594&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85052585594
SN - 9781943580422
T3 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
BT - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018
Y2 - 13 May 2018 through 18 May 2018
ER -