Fundamentals of wafer rinse processes and the interactions with water conservation and recycling in semiconductor manufacturing plants

F. Shadman, D. Seif, T. Peterson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Fundamentals of wafer rinse processes and the interactions with water conservation and recycling in semiconductor manufacturing plants'. Together they form a unique fingerprint.

Keyphrases

Agricultural and Biological Sciences